Head:
RNDr. Milan Držík, CSc.
Scope of the Laboratory:
Development and application of advanced optical/laser based methods for mechanical and thermomechanical characterization of micro/nano structures and optical nanometrology.
Research activities:
- Characterization of nanostructures and topography of surfaces by optical means – flatness of surfaces, thin layer surface nanoparticles distribution, surface micro/nano-texture measurement by scanning and integral optical methods, diffraction based diagnostics of the periodical micro/nano-structures ;
- Detection of surface microstructure changes and defects identification by analysis of speckle field decorrelation and by observation of surface acoustic wave damping inside thin films;
- Mechanical/thermal properties testing and characterization of microelectronics materials, determination of residual stress inside multilayer systems, identification of intrinsic and thermal stresses;
Diagnostic and measurement of fundamental material parameters of thin films and evaluation of MEMS parameters; - Using of optical methods based on coherent imaging and phase visualization with opto-electronic detection in the field of nanotechnologies, nanoparticle systems behavior, investigation of thermal and diffuse processes.
Selected applications:
- Development of autocollimation and phase visualization optical methods, confocal measurement system.
- Realization of holographic/speckle interferometry setups, microinterferometry of MEMS.
- Development of the photodeflectometry setup: Laser exitation: Nd:YAG 1.06 nm/ 200 mW, Laser probe: He-Ne LGN-303, Detector: photodiode FD-19, Lock-in amplifier, Chopper, Oscilloscope, CCD camera, adjustment equipment.
- Development of thin film ultrasonics with contactless laser pulse excitation/probing: at least 1 mJ energy Nd:YAG laser 1064 nm frequency of surface acoustic wave (SAW) up to 1 GHz.
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